99.7% alumina ceramic wafer polishing plate ya CMP

Chemshunmbale yopukutira alumina wafer/turn table imapangidwa ndi alumina yoyera kwambiri ya 99.7-99.9%. Ceramic ya alumina yoyera kwambiri imakhala ndi kulimba kwakukulu komanso kukana kusweka bwino popukuta wafer ndipo imasunga mawonekedwe abwino pamwamba kwa nthawi yayitali. Imapangidwa ndi PIBM. Ndi membala wa makampani opanga ma semiconductor chifukwa cha kukhazikika kwake kosayerekezeka kwa kutentha ndi mawonekedwe komanso kukana kumadera ovuta a zida zopangira ma microchip.

Kupanga Mapangidwe a Mankhwala ndi Makina (CMP), komwe kumadziwikanso kuti Kupukuta kwa Mankhwala ndi Makina, ndi ukadaulo wopanga zida za semiconductor. Imagwiritsa ntchito dzimbiri la mankhwala ndi mphamvu zamakaniko kuti ipange ma wafer a silicon kapena zinthu zina zapansi panthaka panthawi yokonza.

Zipangizo za CMP zimagawidwa m'magawo awiri: gawo lopukuta ndi gawo loyeretsa. Gawo lopukuta lili ndi magawo anayi, omwe ndi ma turntable atatu opukuta ndi gawo loyika ndi kutsitsa wafer. Gawo loyeretsa limayang'anira kuyeretsa ndi kuumitsa wafer kuti "iume ndi kuuma" wafer. Mu zida zonse zopukuta, alumina ceramics imagwira ntchito yofunika kwambiri.

Zida za alumina nthawi zambiri zimagwiritsidwa ntchito pokonza ma disc opukutira ma wafer, omwe amafunika kuyera kwambiri, kulimba kwa mankhwala ambiri, komanso kuwongolera bwino mawonekedwe ndi kuuma kwa pamwamba.

Chida chopukusira cha ceramic cha Chemshun 99.7% Al2O3 chimapangidwa ndi zipangizo zapamwamba za ceramic, zomwe ndizoyenera kupukusira zinthu zosiyanasiyana, makamaka kupukusira zinthu zofooka monga ma wafers, zidole za ceramic ndi galasi. Chida chathu chopukusira cha ceramic chingapangidwe m'makulidwe osiyanasiyana malinga ndi mitundu yosiyanasiyana ya kupukusira ndi kupukuta.